Ha likaroloana tse nang le matla a phahameng li hlasela bokaholimo bo tiileng, likaroloana tse holim'a metsi a tiileng li ka fumana matla 'me tsa phonyoha holim'a metsi hore li behoe holim'a substrate.Ketsahalo ea sputtering e ile ea qala ho sebelisoa ho thekenoloji ea ho roala ka 1870, 'me butle-butle ea sebelisoa tlhahiso ea indasteri ka mor'a 1930 ka lebaka la ho eketseha ha sekhahla sa deposition.Thepa e atisang ho sebelisoa e nang le lithupa tse peli e bonts'itsoe ho Setšoantšo sa 3 [Sets'oants'o sa moralo oa "vacuum coating coating pole sputtering").Hangata thepa e lokelang ho kenngoa e entsoe ka poleiti-sepheo, se behiloeng holim'a cathode.Substrate e behiloe holim'a anode e shebaneng le sebaka seo ho shebiloeng ho sona, lisenthimithara tse seng kae hole le sepheo.Ka mor'a hore tsamaiso e pompeloe sebakeng se phahameng, e tlatsitsoe ka 10 ~ 1 Pa gas (hangata argon), 'me motlakase oa li-volts tse likete tse' maloa o sebelisoa pakeng tsa cathode le anode, 'me ho hlahisoa khanya e khanyang pakeng tsa li-electrode tse peli. .Li-ion tse ntle tse hlahisoang ke ho tsoa li fofa ho ea ho cathode tlas'a ketso ea tšimo ea motlakase 'me li thulana le liathomo tse holim'a sebaka se lebisitsoeng.Liathomo tse shebiloeng tse phonyohang sebakeng seo ho shebiloeng ho sona ka lebaka la ho thulana li bitsoa liathomo tsa sputtering, 'me matla a tsona a pakeng tsa 1 ho ea ho mashome a li-volts tsa elektronike.Liathomo tse hloekisitsoeng li behiloe ka holim'a substrate ho etsa filimi.Ho fapana le ho roala mouoane, ho roala ha sputter ha ho felle feela ka ntlha ea ho qhibiliha ha thepa ea filimi, 'me ho ka fafatsa lintho tse hanyetsang tse kang W, Ta, C, Mo, WC, TiC, joalo-joalo Filimi ea motsoako oa sputtering e ka hasoa ke sputtering e sebetsang. mokhoa, ke hore, khase e sebetsang (O, N, HS, CH, joalo-joalo) ke
eketsoa ho Ar gase, 'me khase e sebetsang le li-ion tsa eona li itšoara ka athomo e lebisitsoeng kapa athomo e sputtered ho etsa motsoako (joaloka oxide, nitrogen) Compounds, joalo-joalo) 'me e kenngoa holim'a substrate.Ho ka sebelisoa mokhoa o phahameng oa ho sputtering ho kenya filimi e sireletsang.Substrate e behiloe holim'a electrode e thehiloeng fatše, 'me sepheo sa insulating se behoa holim'a electrode e fapaneng.Qetello e 'ngoe ea phepelo ea motlakase e phahameng e thehiloe fatše,' me pheletso e 'ngoe e hokahane le eleketrode e nang le sepheo sa insulating ka marang-rang a ts'oanang le DC e thibelang capacitor.Ka mor'a ho chencha phepelo ea matla a phahameng-frequency, motlakase o phahameng o tsoela pele ho fetola polarity ea oona.Li-electrone le li-ion tse ntle ka har'a plasma li otla sepheo sa insulating nakong ea potoloho e ntle ea halofo le halofo e mpe ea potoloho ea motlakase, ka ho latellana.Kaha motsamao oa elektrone o phahame ho feta oa li-ion tse ntle, bokaholimo ba sepheo sa insulating bo qosoa hampe.Ha ho fihleloa tekano e matla, sepheo se boemong bo bobe ba leeme, e le hore li-ion tse ntle tse fallang holim'a sepheo li tsoele pele.Tšebeliso ea magnetron sputtering e ka eketsa sekhahla sa deposition ka hoo e batlang e le taelo ea boholo ha e bapisoa le sputtering e seng ea magnetron.
Nako ea poso: Jul-31-2021