Theknoloji ea "vacuum coating", eo hape e tsejoang e le thekenoloji ea filimi e tšesaane, e sebelisoa liindastering tse fapa-fapaneng, tse kang liphahlo tse sa tsoa khuoa indastering ea lijo, lifilimi tse thibelang kutu, tlhahiso ea lisele tsa letsatsi, likhabiso tse khabisitsoeng bakeng sa lisebelisoa tsa kamore ea ho hlapela le mabenyane. , ha re bolela tse seng kae.
Mmaraka oa lisebelisoa tsa vacuum coating o arotsoe ho latela ts'ebeliso, theknoloji le sebaka.Mabapi le theknoloji, 'maraka o boetse o arotsoe ka lik'hemik'hale tsa mouoane oa lik'hemik'hale (CVD), deposition ea' mele (ntle le sputtering), le sputtering.
Karolo ea 'mele ea ho beha mouoane e arotsoe ka mouoane le tse ling (pulsed laser, arc laser, joalo-joalo).Karolo ea mouoane e lebelletsoe ho bonts'a keketseho e kholo lethathamong la nako la lipatlisiso ka lebaka la kholo e matla ea indasteri ea semiconductor.
Tlas'a sputtering, 'maraka o arotsoe ka reactive sputtering, magnetron sputtering (RF magnetron sputtering, joalo-joalo (pulsed DC, HPIMS, DC, joalo-joalo)) le tse ling (RF diode, ion beams, joalo-joalo).
Tšimo ea magnetron sputtering e ntse e hola butle-butle, e tsamaisoa ke mekhoa e metle e amanang le indasteri ea tlhahiso le lisebelisoa tsa elektroniki.
Mabapi le ts'ebeliso, mmaraka o arotsoe ka lits'ebetso tsa CVD, lits'ebetso tsa PVD, le lits'ebetso tsa sputtering.Tlas'a ts'ebeliso ea PVD, 'maraka o arotsoe hape ka lisebelisoa tsa bongaka, li-microelectronics, lisebelisoa tsa ho itšeha, polokelo, matla a letsatsi le tse ling.Karolo ea polokelo e lebelletsoe ho paka kholo e ntle nakong ea tlhahlobo ka lebaka la tlhokahalo e ntseng e eketseha ea polokelo le botumo bo ntseng bo hola ba li-SSD.
Lisebelisoa tse ling tsa PVD li kenyelletsa likarolo tsa sefofane, likarolo tsa koloi, ho paka, le tse ling.
Tlas'a lits'ebetso tsa sputtering, 'maraka o arotsoe ka lifilimi tsa makenete, li-sensor tsa khase, tšepe ea li-circuits tsa microelectronic le li-chip carriers, lifilimi tse hananang le kutu, lifilimi tse hanyetsanang, lisebelisoa tsa polokelo ea mahlo, jj.
Tlas'a ts'ebeliso ea CVD, 'maraka o arotsoe ka polymer, potoloho e kopaneng (IC) le lisebelisoa tsa photovoltaic, le lisebelisoa tsa tšepe tsa tšepe (polokelo ea khase, adsorption, polokelo le tlhoekiso, sensing ea khase le dielectric tse tlase-k, catalysis, jj.), le tse ling. .
Nako ea poso: May-12-2022