WVCP3000 Mouoane oa Metsi Cryopump Cryogenic Refrigeration Systems

Tlhaloso e Khutšoanyane:

Fast Defrost
Sefi se batang se pholile ho fihlela ho -135 ℃
Fokotsa linako tsa ho pompa ka 25% ho isa ho 50%
Tšebeliso e tlase ea matla
Tšusumetso e fokolang ea tikoloho, e se nang CFC le HCFCs

Re romelle lengolo-tsoibila

Lintlha tsa Sehlahisoa

Li-tag tsa Sehlahisoa

Tlhaloso ea Sehlahisoa

Guangzhou Xieyi Automation Technology Co., Ltd., e thehiloeng ka 2011, ke khoebo e ikhethang ea theknoloji e phahameng naheng ea China Boroa e sebetsanang le nts'etsopele ea lipatlisiso, tlhahiso, lipuisano tsa botekgeniki le ts'ebeletso bakeng sa lipompo tsa ho ts'oara mouoane oa metsi ka mocheso o tlase o tlase le tse ling. lisebelisoa tsa mocheso o tlase haholo.

XIEYI WVCP Cryochillers ke lisebelisoa tse koetsoeng tsa sehatsetsi sa cryogenic tse fanang ka li-watts tse 550 ~ 6,000 watts tsa ho pholisa.Li-cryochillers tsena li ka sebelisoa ho tšoara mouoane oa metsi le lintho tse ling tse kolobisang ka ho li hatsetsa sebakeng se batang joalo ka Meissner coil (cryocoil).Li-cryochillers tsa WVCP li boetse li sebelisetsoa ho pholisa lintho tse kang li-chucks tsa electrostatic tse sebelisoang ha ho etsoa semiconductor wafer processing.

Tekheniki Parameter

Mohlala	WVCP3000-SH	WVCP3000-DH
Boholo ba matla a ho pholisa(W)	3000	3000
Khopolo-taba ea lebelo le phahameng la ho pompa la sefi se batang sa tubula(L/S)	249900	249900
Khopolo-taba ea lebelo le phahameng la sefi se batang sa poleiti(L/S)	352800	352800
Sekheo sa ho qetela(mbar)	2*10-8	2*10-8
Nako ea ho qhibiliha sebakeng se batang haholo (metsotso)	<3	<3
Mofuta o feto-fetohang oa mocheso oa defrost(℃)	-20 ~ 30	-20 ~ 30
Mokhoa oa ho laola khatello	Sensor ea dijithale + switch ea mochini	Sensor ea dijithale + switch ea mochini
Ts'ebetso ea khatello ea ho khutlisa kapele (QRBP)	Ee	Ee
Mosebetsi oa bopaki ba ho thibela oli (OBP)	Ee	Ee
Taolo ea Remoutu ea 4G	Ee	Ee
Lintho tse batang tsa media	Pro-tikoloho	Pro-tikoloho
Sebaka se seholo sa sefi se batang sa tubular(㎡)	1.7	1.7
Sebaka se seholo sa sefi se batang sa poleiti(㎡)	2.4	2.4
Specification of single cold trap(㎡)	φ16mm*34m	/
Specification of double cold trap(㎡)	/	2 * φ16mm*17m
Khokahano ea khase	12.7 copper welded junction(E tloaelehileng)	12.7 copper welded junction(E tloaelehileng)
Khokahano ea khase	ParkerCPI/VCR(Boikhethelo)	ParkerCPI/VCR(Boikhethelo)
Phallo ea metsi a pholileng (L/Mits ho 24 ℃)	28	28
Thempereichara ea alamo ea metsi a pholileng(℃)	38	38
Tora e phodileng	Ee	Ee
Sehokelo sa metsi a pholileng(L/S)	G3/4	G3/4
Boholo ba matla a ho jara(kW)	16.5	16.5
Compressor nominal power(HP)	10	10
Phepelo ea matla (50HZ)	380-400V AC 3P(H)	380-400V AC 3P(H)
Phepelo ea matla (50HZ)	200-230V AC 3P(L)	200-230V AC 3P(L)
Dimension(MM)	935(L)873(D)1809(H)	935(L)873(D)1809(H)
Boima (KG)	480	480